Copper water swishing
نویسندگان
چکیده
منابع مشابه
Water diffusion coefficients during copper electropolishing
Cu electropolishing was studied using a rotating disc electrode in a variety of phosphoric acid-based electrolytes, including several with ethanol and other species added as diluents. Diluents allow a wider range of water concentrations and electrolyte viscosities to be accessed and also reduce the removal rate during Cu electropolishing, simplifying possible application to damascene processing...
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ژورنال
عنوان ژورنال: British Dental Journal
سال: 2019
ISSN: 0007-0610,1476-5373
DOI: 10.1038/s41415-019-0381-9